Main Authors Polushkin Ye.A.
Polushkin Ye.A.

Institute of Microelectronics Technology and High-Purity Materials of the Russian Academy of Sciences

Chernogolovka, Moscow region, Russian Federation

Polushkin Ye.A.

Ye.A. Polushkin (b. 1981) graduated from the Moscow Engineering and Physics Institute in 1990. Junior researcher of the Institute for Problems of Microelectronics Technology and High-pure Materials of RAS. Author of 3 publications in the field of plasmochemistry.

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